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Precursor Yuav Tsum Tau Ua Si

Jun 20, 2018

Precursor Yuav Tsum Tau Ua Si


Muaj ntau cov tshuaj ((feem ntau cov atomic feem pua)
ntawm hydrogen nyob rau hauv lub yeeb yam A-Si yuav ua rau cov neeg pluag
zoo laser-crystallized poly-si films
- Cov tshuaj hydrogen evolves, ua rau
crystallized zaj duab xis kom muaj npuas / qhov
PECVD a-Si: H yuav tsum tau dehydrogenated ua ntej
laser crystallization tsho
kub thermal ( xws li 1 teev ntawm 450oC)
tsis tshua muaj lub ntsej muag laser anneal
Si cov xim tuab tuab yuav tsis zoo dua
± 5%, rau kev hnav hom loj

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