Tsev > Xov xwm > Ntsiab lus

Kev Txheeb Ze Ntawm Cov Txheej Txheem Feem Xeem thiab Raug Txim

Nov 17, 2017

Muaj ntau qhov kev sib tw thiab cov kev tsim tawm tau coj los ua kom tau cov duab zoo raws li lub hom phiaj. Graphics experimental results tau tshwm sim los ntawm daim ntawv thov ntawm SEM kev ntsuam xyuas los saib xyuas kev siv cov khoom, Nyiv JEOL tuam txhab JSM-6401F, field emission, 3 nm.


Nyob rau hauv lub nplov silicon CMOS Fin FET ntaus, cov nplua groove qauv luam tawm substrate cov ntaub ntawv yog SiO 2 (multilayer dielectric zaj duab xis), tab sis, yuav kom kawm txog electron beam lithography technology nws tus kheej, nws tseem tau kawm hauv cov kev sim

Kev raug, kev txhim kho thiab kev paub ntawm UV3 ntawm tuab SiO 2 thiab tej thooj txhij loj (feem ntau hauv cov qub) raug tshawb xyuas.


1. Feem ntau ntawm zaj duab xis tuab ntawm kev tawm tsam

Nyob rau hauv cov txheej txheem ntawm electron beam raug, ib tug ntau dua daim duab tau tuaj yeem tau los ntawm thinner thickness. Qhov no yog vim thinner tsuas yog xav kom txo qis koob tshuaj; thiab electrons nrog tib lub zog muaj feem ntau yuav txeem tau qhov kev tawm tsam, kom lub tshuab hluav taws xob tawg nto txo thiab qhov kev daws teeb meem ntawm qhov qauv zoo tuaj.


Cov txheej txheem ntawm cov txheej txheem: nyob rau lub tshuab tsis siv neeg hloov homogenizing, ua ntej, 10 ml tiv thaiv yog dripped ntawm 100 hli silicon wafer, thiab ces spin evenly ntawm tus ceev ntawm 800 rpm. Thaum kawg, cov kua nplaum yog muab faib rau kev kub ceev rau 30 s. Lub thickness film ntawm tus resist yog txiav txim tau los ntawm cov kev sib hloov kom ceev thiab cov viscosity ntawm tus tiv nws tus kheej (xws li, cov muaj pes tsawg leeg ntawm lub resist). Qhov siab tshaj plaws uas tau tso rau hauv lub tshuab yas teeb (7000 RPM), thiaj li yuav tau txais ib daim duab nyias thav ntawv, daim ntawv no ua rau lub ntsuas qhov nruab nrab UV 3, thinning agent rau ethyl lactate.


Nyob rau tib txoj kev raug mob thiab kev loj hlob zoo (qhov zoo tshaj plaws rau cov mob), cov nyom ntawm cov tawv nqaij sib txawv ntawm qhov sib txawv ntawm qhov sib txawv, thiab cov txiaj ntsim tau tshwm nyob rau hauv rooj 1.


Cov kev sim tau pom tias tus thinner qhov kev tawm tsam yog qhov loj me me. Qhov qis qis ntawm cov npoo tuab yog tias cov khoom siv tshuaj ntawm cov gel yog yeej tswj tseg thaum lub sij hawm dilution thiab yuav tsum tau ntsej muag nyob rau hauv cov txheej txheem txheej txheem tom qab.

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2. Qhov cuam tshuam ntawm cov hlau nqaj hlau tsis tau

Raug teeb meem rau electron beam raug txheej txheem, lub ntsiab tseem ceeb rau kev tseeb ntawm cov duab raug zog raug, zog nqaj hlau, kev nplhaib kab sib txuas, ntsia hlau electron ntiv raug UV3 zoo tiv thaiv txheej txheem 2003, lawv txiav txim siab qhov raug Chaw loj thiab thaj tsam ntawm lub tshav .


Nws muaj qhov tseem ceeb sib txawv ntawm qhov loj me me thiab qhov qauv ntawm cov qauv. Daim duab 1 qhia SEM groove tus qauv nyob rau hauv peb lub caij sib tw. Cov nqaj dej muaj qhov ntxoo rau peb yam (50 keV, 4 LO, nqaj dej tsaws 25 pA, 50 pA thiab 100 pA) yog 30 nm, 50 nm, 100 nm thiab 50 keV, feem.


Rau 50 nm tsim linewidth, cov ntsiab lus ntawm nws raug pom hauv daim duab 1, ntsig txog 160 nm, 180 nm, 230 nm. Qhov kawg ntawm ob lub teeb duab yog tus daig, thaum thawj daim duab ntug kev muaj qhov pom tseeb.


Qhov no yog vim hais tias qhov sib txawv ntawm qhov teeb meem ntawm qhov nqaj nqaj me me (30 nm) tsis tshua muaj cawv nyob rau cheeb tsam ib puag ncig ntawm qee qhov kev hloov pitches, yog li ntawm thaj tsam ntawm cov ntawv luam tawm ntawm cov luam muag pom zoo, ua rau tus qauv ntawm cov qauv los hloov.

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Qhov loj ntawm daim teb kuj muaj feem xyuam rau qhov sij hawm raug. Rau ib daim phiaj zuj zus ntawm ib lub xov tooj ntawm tes 2. 8 hli × 2.1 hli, lub sij hawm raug rau saum toj no peb lub sijhawm yog 60 min, 30 min, thiab 15 min, feem ntau, thiab nrog lub hom phiaj thib tsib, lub sij hawm nce ntxiv los ntawm 50% saum toj no.


Ib qho tseem ceeb ntawm kev cuam tshuam qhov tseeb ntawm tus qauv yog qhov cuam tshuam qhov sib txawv ntawm electron beam raug. Electron tawg zes hluav taws xob, hluav taws xob nyob hauv lub cev thiab lub substrate ntau ntau kev sib tsoo, tawg, thiaj li nyob rau thaj tsam ntawm thaj chaw uas nyob ze rau thaj av los tsim ib qho kev raug mob, uas ua rau ntawm ntug duab blur, deformation, steepness poob, uas yog Daws teeb meem ntawm electron beam raug.


Cov teebmeem sib thooj yuav tsum raug kho rau cov qauv duab, txwv tsis pub qhov tseeb ntawm cov duab yuav raug dominated. Lub ntsiab txoj hauv kev los mus kho qhov sib txawv ntawm cov nyhuv yog kev kho lub cev, qauv kev cai, GHO ST, software synthesis thiab lwm yam.


Txij li thaum lub sij hawm qhov teeb tsa ntawm cov cuab yeej qhov tsim tawm kuj yooj yim, yuav luag tag nrho cov qauv ncaj-ncaj, thiab sib nrug heev, yog li tsis muaj kev cuam tshuam kev daws teeb meem. Tsis tas li ntawd, ib qho me me ceev fais teb tau mus rau qhov chaw nqaj loj thiab qhov sib thooj, thiab tsis muaj pauv tau tshawb xyuas hauv daim ntawv no.


Lub caij ua haujlwm zoo tshaj plaws optimization tau: muaj kev ua haujlwm ntawm 50 keV, ib tug nqaj ntawm 50 pA, ib daim phiaj daim phiaj zuj zus ntawm 12.5 nm, ib qho tseem ceeb ntawm lub lens plaub uas tsis muaj kev kho ntawm qhov sib thooj.


3. Nyhav rau kis tau tus kab mob

Rau kev zoo, cov kua nplaum poob ntawm cov txheej txheem tsub ntxiv nrog rau kev txo tsawg koob tom qab txhim kho. UV3 electron nqaj kis kab mob sib piv curve qhia hauv daim duab 2 nyob rau sab laug axis.


Nyob rau ntawm 50 keV, ib tug nqaj tam sim no ntawm 50 pA, ib daim qauv ntawm daim phiaj ntawm 12.5 nm, electron beam raug ntawm plaub lub lens, thiab CD-26 txoj kev loj hlob rau 1 min, qhov tseem ceeb ntawm UV 3 topography yog 18 μC / cm 2 , Tus tiv thaiv kab mob-qhov sib txawv ntawm qhov sib piv ntawm 2.84 (Ntsiab lus 1 / (lo g10 Dc-log10 D0)).


Ntawm qhov tod tes, kis koob kuj cuam tshuam qhov loj me ntawm tus qauv, uas yog tshwm sim los ntawm cov hluav taws xob nqaj sib thooj. Txoj cai axis ntawm daim duab 2 qhia tau hais tias txoj kev sib raug zoo ntawm qhov tseem ceeb ntawm daim duab thiab qhov koob tshuaj. Txawm hais tias muaj cov kab mob tsawg dua los ntawm cov kab mob tsawg dua, cov npoo ntawm tus qauv yog cov neeg pluag thiab tej zaum yuav qee cov kua nplaum nyob hauv qhov grooves; raws li kev noj tshuaj ntxiv, qhov dav dav nce. Yog li ntawd, peb yuav tsum tau optimize tus raug koob tshuaj

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