Tsev > Xov xwm > Ntsiab lus

Txhim Kho Txoj Kev Layout

Jan 16, 2018

Nrog cov txo cov txheej txheem, lub thickness ntawm oxide txheej ntawm lub ntim silicon MOS ntaus ntawv kuj yog thinner. Vim li no, qhov pib ntawm qhov pib ntawm qhov pib ntawm qhov tag nrho cov tshuaj nyhuv tuaj yeem raug tsis lees paub. Txoj kev tawm ntawm thaj chaw / thaj chaw uas muaj tshwm sim los ntawm tag nrho cov nyhuv tshuaj thiab qhov tawm ntawm cov pa pa hluav taws tsuas tuaj yeem txhawb kev tsim qauv tsim. Qee qhov tshwj xeeb ntawm cov teebmeem particle kuj tseem tuaj yeem siv zog los ntawm kev tsim qauv tsim.


1.1 Zuj zus txoj kev ntawm tag nrho cov nyhuv kab tsim tawm

Ua ntej, cov qauv ntawm cov khoom siv khawm uas xaiv tau yog cov qauv ntawm lub vas kiab, ua piv txwv ntawm NMOS lub raj, raws li muaj nyob hauv daim duab 7. Hauv Daim duab 7 (a), lub davhlau ya D nruab nrab yog lub qhov dej ntawm qhov cuab yeej. Lub davhlau ya nyob S nruab nrab yog qhov chaw kawg ntawm qhov cuab yeej, G yog lub qhov rooj ntawm lub NMOS lub raj, qhov dub thaiv yog qhov tiv thaiv qhov, thiab lub periphery yog tiv thaiv lub suab paug tiv thaiv los ntawm P +. Tus qauv teeb tsa, tshem tawm cov kab mob MOS cov cuab yeej ntawm tus npoo ntawm lub raj, MOS cov cuab yeej tsis yog txoj kev nqhis / tso dej ntws tawm ntawm qhov xaus thiab koom nrog lub P thaiv kev tiv thaiv; tom qab lub NMOS ntawm cov khoom siv hluav taws xob sib txawv vim yog los ntawm tag nrho cov koob tshuaj siv ntawm oxide txheej nyob rau hauv txoj kev tawm tsam, tuaj yeem ua lub luag haujlwm. Ntu ntev ntawm seem yog qhia hauv daim duab 7 (b). Los ntawm qhov profile, peb tuaj yeem pom tau tias vim qhov kev rho tawm ntawm kab sib chaws, lub tsho tiv thaiv sab nrauv yog tshem tawm ntawm qhov chaw / ntws ntawm lub cuab yeej, thiab txoj kev mus los ntawm tag nrho cov koob tshuaj tau raug tshem tawm.

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Txawm hais tias lub nplhaib ntawm lub nplhaib tuaj yeem txhim kho qhov cov pa taws ntawm MOS raj hauv tag nrho cov koob tshuaj xoob, qhov W / L piv ntawm MOS raj yog qhov txwv ntau heev thiab cheeb tsam tseem kim heev tom qab siv lub vas kiv lub nplhaib. Qhov sib txawv ntawm W / L ntawm MOS cov cuab yeej hauv lub vas kiab vib thab plaub yog 4: 1, thiab nws yuav luag tsis siv cov qauv no kom tiav ib qho kev faib me me los yog ib qho MOS raj. Thaum lub thawv MOS raj yog ntsib nyob rau hauv kev tsim ntawm cov hluav taws xob teeb tsa, kev teeb tsa layout, xws li daim duab 8, yuav siv tau. Hauv cov qauv no, lub qhov rooj thiab lub qhov rooj oxide kuj raug siv cais tawm ntawm qhov chaw thiab cov dej ntws ntawm MOS raj, tshem tawm cov kab uas twb muaj lawm lawm, yog li tshem tawm cov pa tawm ntawm qhov chaw thiab lub hnub xaus ntawm lub cuab yeej. P + nplhaib tseem siv los cais cov cuab yeej ntawm cov chaw nyob ib puag ncig, kom ntseeg tau tias tsis muaj xau ntawm cov khoom siv sib txawv nyob rau hauv tag nrho koob tshuaj tawg. Daim duab 9 yog ib qho qauv siv rau MOS qhov cuab lub zog zoo ib yam li cov raj xa ncaj. Hauv kev ua kom muaj zog ntawm tes, kom tsis txhob muaj cov pa hauv lub tshav pob los ntawm kev siv tag nrho cov tshuaj, PMOS tube qauv zoo ib yam li tau txais kev cais tawm ntawm txoj kev tawm ntawm cov pawg. Lub hauv paus ntsiab lus muaj nyob rau hauv daim duab 10. Qhov qauv no ntxiv qhov rooj tiv thaiv lub rooj hauv qhov muaj oxygen. Thaum twg tsis muaj qhov tsis pom qhov muaj qhov tsis zoo, qhov zoo yog qhov nqus ntawm lub substrate, yog li absorbing electrons nyob rau hauv cov pa tawm ntawm cov hluav taws xob, ua kom cov dej ntub tawm cais tawm ntawm cheeb tsam nrog kev txhaum. Muab piv txwv nrog P + thaj tsam ncig lub nplhaib kev sib txuas lus yog ib txwm ua, tus tsim tsis tsuas yog tshem tawm thaj tsam ntawm thaj tsam ntawm N + thiab P + cov cheeb tsam yam tsawg kawg yuav tsum tau ua raws li kev txwv, kho qhov hluav taws xob cov zis, thiab ua li no tsis pom zoo, nyob rau qhov lus teb rau cov nqi xau vim qhov txawv cov koob tshuaj uas tshwm sim los ntawm kev sib txawv.

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1.2 Layout qhov cuab lub zog ntawm cov nyhuv Ib qho Kun Effect (Quenching)

Nrog rau cov txheej txheem thawb tawm, cov nyhuv ntawm cov kev tshwm sim hauv cov khoom siv yuav tsis tas yuav tag rau ib qho ntawm ib qho xwb, tab sis yuav tau sib tw ntawm cov neeg nyob sib ze. Ib qho yooj yim ntawm cov khoom siv sib qiv nyiaj sib faib khoom yog qhov Kun tilting effect (Quenching). Piv txwv, hauv qhov tsim ntawm NAND lub rooj vag, lossis lub rooj vag log, feem ntau ob series MOS cov duab ntawm cov duab thawv duab raws li qhia hauv daim duab 11. Qhov kev sib cog ua los ntawm kev teeb tsa no yog cuam tshuam los ntawm cov khoom siv ib feem xyuam thiab muaj feem xyuam rau thaj tsam ntawm thaj chaw ntawm ob tug MOS plab hlaub, raws li qhia hauv daim duab 12.

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Yuav kom tsis txhob muaj qhov kev sib koom tes no, ob qhov MOS layout structures in series yuav hloov los ntawm tus qauv ntawm daim duab 13. Hauv kev cuam tshuam ntawm cov kev tshwm sim nkaus xwb, qhov teeb tsa qauv cais tawm thaj chaw sib koom ua haujlwm ntawm ob qhov MOS kav, yog li tshem tawm lub hav zoov ntawm kev sib koom ua haujlwm. Raws li qhia hauv daim duab 14, qhov kev ntseeg ntawm tus ntaus ntawv zoo tuaj.