Tsev > Xov xwm > Ntsiab lus

Dab tsi yog qhov yuav tsum tau ua kom tau raws li kev ua tiav ntawm Photoresist?

Mar 15, 2018

Feem ntau hais lus, kev ua haujlwm ntawm photoresist muaj xws li cov nram qab no:

Kev daws teeb meem: Cov duab kos tsawg tshaj plaws tuaj yeem tsim cov photoresist txheej los yog kev sib kis uas feem ntau siv los txiav txim siab photoresist, ib qho kev txiav txim siab photoresist hais txog cov txheej txheem ntawm kev daws teeb meem, uas muaj qhov chaw nyob thiab tsim cov txheej txheem, hloov cov txheej txheem ntawm lwm photoresist pauv qhov kev sib raug ntawm xam qhov ntawd.


Feem ntau hais lus, qhov dav thinner kab xav tau cov phev phom duab nyias los ua. Yog li ntawd, photoresist zaj duab xis yuav tsum tau tuab txaus kom ua tau qhov kev ua ntawm kev thaiv kev sib cav thiab xyuas kom meej tias tsis muaj lub tshuab nqus tsev. Yog li ntawd, kev xaiv ntawm photoresist yog kev ua lag luam ntawm ob lub hom phiaj. Tus lej siab tshaj plaws (piv piv) tuaj yeem siv los ntsuas qhov peev xwm tshwj xeeb ntawm photoresist kom muaj feem xyuam rau qhov kev daws teeb meem thiab ntawm qhov photoresist thickness. Qhov zoo ntawm kev nplaum nplaum muaj qhov sib txawv dua, piv txwv li nws yog qhov tsim nyog rau txoj kev xaiv loj ntawm qhov loj hauv kev loj hlob.


Muaj peev xwm txhim kho: Photoresist yuav tsum ua raws li qhov zoo rau lub nplaim ntawm wafer, txwv tsis pub lub etching yuav distort. Lub peev xwm los tiv thaiv kev sib txawv ntawm qhov sib txawv ntawm qhov sib txawv yog qhov sib txawv, ntau txoj kev photoresist yog ua kom muaj peev xwm tsev photoresist thiab tsim, tsis muaj kua nplaum yog muaj peev xwm muaj zog dua qhov kev sib raug zoo.


Raug kev ceev thiab rhiab heev: Qhov ceev cov photoresist cov tshuaj tiv thaiv, ua kom ceev ceev. Photoresist rhiab heev thiab ua rau photoinduced polymerization los yog dissolution tshwm sim rau tag nrho cov zog, nrog lub zog zoo thiab raug wavelength ntawm tej qhov chaw, seb nws yog ultraviolet, pom teeb, xov tooj cua tsis, X rays, uas yog electromagnetic hluav taws xob, lub luv dua lub wavelength, qhov siab zog, qhov ntawm lub zog ntawm qhov pom, X huab ultraviolet txoj sab ci>>>> qhov tob ultraviolet UV pom lub teeb.


Txheej txheem muaj peev xwm dav: Qhov txawv ntawm sab nraud tuaj yeem tshwm sim hauv txhua kauj ruam ntawm tus txheej txheem. Qee cov photoresists muaj ntau npoo ntawm kev sib txawv hauv cov txheej txheem kev sib txawv thiab muaj kev dav dav ntawm cov txheej txheem. Qhov dav dav qhov txheej txheem yog, qhov ntau dua tau ntawm kev tsim nyog qhov kev ua tiav loj nyob rau ntawm wafer nto.


Pinhole yog npliag lub photoresist txheej yog qhov me me ntawm cov pinhole, yuav cia qhov etchant infiltration ntawm photoresist txheej ntawm lub wafer thiab etching qhov, uas ua rau lub pinhole yog txheej los ntawm cov pa paug hauv qhov chaw, ua tau kuj muaj ib lub qhov nyob hauv photoresist txheej qauv los ntawm. Photoresist txheej yog thinner thiab ntau pinhole muaj ntau, vim qhov zoo tshaj piv nrog photoresist film thicker feem ntau tso cai.


Kauj ruam kev pab: Ua ntej wafer ua, muaj ntau cov khaubncaws sab nraud povtseg nyob rau ntawm qhov dej. Nrog lub tshuab raj wafer mus, cov saum npoo tau ntau cov khaubncaws sab nraud povtseg. Hauv kev txiav txim rau lub photoresist kom muaj nuj nqi ntawm blocking etching, nws yuav tsum muaj txaus thav duab thickness rau txheej txheej dhau los.


Cov txheej txheem thermal: Cov txheej txheem kev lis dej num kuj muaj xws li cov txaj muag thiab khov kho, tab sis vim photoresist zoo ib yam li cov khoom yas, nws yuav dhau los ua kom muag muag, los yog qhov teeb meem loj kawg. Yog li, photoresist yuav tsum tswj nws cov khoom thiab cov qauv hauv cov txheej txheem ci.


Phem thiab qib siab: Photoresist, zoo ib yam li lwm cov khoom siv, yuav tsum yog nruj me ntsis cov ntsiab lus ntawm cov ntsiab lus particle, sodium, trace hlau impurities, dej ntsiab lus thiab li ntawm.


Tsis tas li ntawd, nyob hauv tus txheej txheem muaj ntau ntau yam yuav tau xav txog, xws li lub npog ntsej muag nyob rau thaj tsam kaj siab (raug cheeb tsam) tau yooj yim los ntawm cov iav tawg thiab av, yog tias koj siv cov lus tsis zoo yuav tshwm tuaj glue etching qhov, thiab qhov tsaus ib feem yog tsis yooj yim rau tshwm hauv cov pinhole, qhov me me qhov chaw yog nraaj qhov zoo, yog qhov kev xaiv tsuas. Nyob rau hauv tus txheej txheem ntawm tshem photoresist kuj pom, tshem tawm ntawm cov yas tshaj tshem tawm cov kua tsis zoo.